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2 inch aluminum nitride thick film wafer

¡¾Numbering¡¿BK2020081715 ¡¾CAS¡¿
¡¾Item No.¡¿ ¡¾specification¡¿
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Performance parameters:

  • Item AlN-T-C-C50
    Dimension §¶ 50.8 ¡À 0.2 mm
    Thickness/Thickness STD 1-5¦Ìm¡À10%/<3%
    Orientation of AIN C-plane (0001) off angle toward A-axis 0.2¡À0.1¡ã
    Orientation Flat of AIN £¨1-100£©0¡À0.2¡ã£¬16¡À1mm
    Conduction Type Semi-Insulating
    XRD Crystal Quality [1,2)¦Ìm [2,3)¦Ìm [3,4)¦Ìm [4,5)¦Ìm
    (0002)FWHM(arcsec) ¡Ü80 ¡Ü100 ¡Ü120 ¡Ü160
    (10-12)FWHM(arcsec) ¡Ü650 ¡Ü550 ¡Ü450 ¡Ü400
    Structure ~1-5AIN/~20nm AIN buffer/430¡À25¦Ìm sapphire
    Edge Exclusion ¡Ü2.5¦Ìm
    Through Crack None
    Orientation of sapphire C plane(0001) off angle toward M-axis 0.2¡À0.1¡ã
    Orientation Flat of sapphire (11-20)0¡À0.2¡ã£¬16¡À1mm
    Sapphire Polish Single side polished(SSP)/Double side polished (DSP)
    Package Packagesd in a cleanroom in containers

    ɨÃèͼ£º Warm tips: Suzhou Beike nano products are only used for scientific research, not for human body,different batches of products have different specifications and performance
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    Warm tips: Suzhou Beike nano products are only used for scientific research, not for human body,different batches of products have different specifications and performance.The website pictures are from the Internet. The pictures are for reference only. Please take the real object as the standard. In case of infringement, please contact us to delete them immediately.
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